"Ask Ted" - Q&A

 

smith1.gif (12490 bytes)Do you have a question regarding Radio Frequency (RF) power? Take this opportunity to ask our experts. Send an email to askted@comdel.com and include your name and question. Ted and our team of experienced RF engineers will respond to questions received and post the questions (no names will be posted) along with the answers on this web page.

You're probably not the only one out there with the same question--so by asking your question, you may be helping others as well.

Who's Ted?

Ted Johnson founded Comdel in 1966 and has been the president of Comdel ever since. Prior to starting our company, Ted worked as an engineer for IBM in the Federal Systems Division, and for AVCO and the National Radio Company. So with over 45 years of experience in RF technology and a degree from Northeastern University in Electrical Engineering, he along with our team of experts, will tackle your questions and attempt to give you the answers.

Sample Q&A:

Question:

Why is the 13.56 MHz frequency used for RF plasma applications?

Answer:

13.56 MHz is one of several I.S.M. frequencies mandated by the FCC. These are frequencies set aside for Industrial, Scientific, and Medical purposes and have relaxed emissions limitations because they are so positioned in the radio wave spectrum as to not interfere with safety, emergency, and military communications. It just happens that this particular ISM frequency has the most plasma research historical data.

Question:

How is plasma etching and deposition done?
In relation to substrate and target configuration?

Answer:

Here is an excellent book for these questions:

Principles of Plasma Discharges and Materials Processing
by Michael A. Lieberman

 

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