CB Series High Frequency RF Power Supplies

CB Series High Frequency RF Power Supplies

Comdel's Superior Design and Reliability in a Small, Lightweight Package

The CB series is the culmination of 45 years of RF plasma and heating experience. We have taken the proven rugged design of the CX series power amplifier section and combined it with all the innovation in DC supplies and diagnostics to make a compact, stable  RF power supply without compromising reliability for size.  These single frequency RF power supplies operate in the HF band (3.39MHz to 30MHz) still benefiting from Comdel’s “S” technology

Performance

RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel's proven RF amplifier technology.

Models
Model Name

CB600

Output Power / Frequency
600W,  
3.39MHz - 30MHz
Dimensions

4"H x 5"W x 12"D
(10.2cm x 12.7cm x 30.5cm)

Weight

15 lbs.
(6.8 kg)

Cooling

Water: 0.5 GPM
(2 liters)

Line Voltage

208,400,480 VAC

Line Current

Nominal

Standard Output Connectors

N or C

Model Name

CB1250

Output Power / Frequency
1250W,  
3.39MHz - 30MHz
Dimensions

5"H x 8"W x 16"D
(12.7cm x 20.3cm x 40.6cm)

Weight

35 lbs.
(16 kg)

Cooling

Water: 1 GPM
(3.8 liters)

Line Voltage

208,400,480 VAC

Line Current

Nominal

Standard Output Connectors

N or C

Model Name

CB3000

Output Power / Frequency
3000W,  
3.39MHz - 30MHz
Dimensions

5.20”H x 17”W x 22”D
(13.20 cm x 43.18 cm x 55.88 cm)

Weight

95 lbs.
(43 kg)

Cooling

Water: 3 GPM
(11.44 liters)

Line Voltage

208,400,480 VAC

Line Current

Nominal

Standard Output Connectors

HN or LC or 7/16

Model Name

CB5000

Output Power / Frequency
5000W,  
3.39MHz - 30MHz
Dimensions

5.25"H x 19"W x 22"D
(13.3cm x 48.3cm x 56cm)

Weight

95 lbs.
(43 kg)

Cooling

Water: 3 GPM
(11.4 liters)

Line Voltage

208,400,480 VAC

Line Current

Nominal

Standard Output Connectors

HN, LC or 7/16

Features
  • Small, lightweight packaging
  • Standard power ranges: 600, 1250, 3000, 5000 Watts
  • Standard fixed frequencies: 3.39 MHz to 30 MHz
  • Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
  • Designed to meet ETL and SEMI F47 directives
  • Forward or Delivered power mode regulation
Applications

The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering and PECVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

Specifications
  • Frequency: Any fixed frequency from 3.39 to 30 MHz
  • Frequency stability: +/- 0.005%
  • Line frequency: 50/60 Hz
  • Analog power command: 0-10 VDC for 0 to maximum output
  • Power accuracy: 2 %
  • Power linearity: 2% of setting at power levels above 10% of rated power
  • Power repeatability: +/- 1% of setpoint into a 50-Ohm load
  • Control I/O connector: Standard: 15-pin subminiature D type (female), Optional: 25-pin subminiature D type (female)
  • Harmonic distortion: Less than -35 dBc
  • Reflected power limit: 20% of full scale typical
Options
  • 3.39 and 6.78 MHz options available, added package height required.
  • High accuracy, low output control: +/- 1% of setpoint from 10-100% rated power
  • Internal fixed match
  • Master/Slave operation
  • Frequency tuning
  • DeviceNet