ESC-HV Electrostatic Chuck Power Supplies

ESC Series Electrostatic Chuck Power Supplies

1-15 kV Models, Industry Standard Interface, designed for volume manufacturing and available with selectable features and flexible packaging option.
Performance

Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

Models
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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Output to input isolation: > 500 Meg ohm 
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  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
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  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
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  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
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  • Cooling: None required
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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<2 lbs.
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+/- 500V

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1kV

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
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  • Built-in RF filtering available.
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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Industry Standard Interface
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  • Intermediate voltages available, consult factory for more information.
  • Flexible Packaging Options:
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  • Industry Standard Interface
  • Designed for Volume Manufacturing
  • Intermediate voltages available, consult factory for more information.
  • Flexible Packaging Options:
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
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  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • All control features are available local (front panel) and remote (25-pin D type connector)
  • All analog setpoint and monitor signals are available as 0-10V full scale, fully differential. Inputs are 200k ohm minimum. Outputs are capable of driving 1k ohm at 10V maximum.
  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector
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  • All control features are available local (front panel) and remote (25-pin D type connector)
  • All analog setpoint and monitor signals are available as 0-10V full scale, fully differential. Inputs are 200k ohm minimum. Outputs are capable of driving 1k ohm at 10V maximum.
  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
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  • Output to input isolation: > 500 Meg ohm 
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
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<2 lbs.
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<2 lbs.
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+/- 500V

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+/- 500V

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1kV

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1kV

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10mA

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10mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Industry Standard Interface
  • Designed for Volume Manufacturing
  • Intermediate voltages available, consult factory for more information.
  • Flexible Packaging Options:
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  • Industry Standard Interface
  • Designed for Volume Manufacturing
  • Intermediate voltages available, consult factory for more information.
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
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3.5"H x 8"W x 6.25"D
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<2 lbs.
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<2 lbs.
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+/- 500V

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+/- 500V

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1kV

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1kV

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10mA

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10mA

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ESC Series Electrostatic Chuck Power Supplies

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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<2 lbs.
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+/- 500V

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Industry Standard Interface
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  • Industry Standard Interface
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
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  • DC output: MHV connectors on HV terminals, BNC on center tap
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  • Output to input isolation: > 500 Meg ohm 
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  • Output voltage balance: Better than 1% for matched loads
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  • Continuously variable output voltage and output current limit
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  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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<2 lbs.
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+/- 500V

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+/- 500V

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1kV

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1kV

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10mA

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10mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
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  • Built-in RF filtering available.
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  • Industry Standard Interface
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  • Output to input isolation: > 500 Meg ohm 
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  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
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  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
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  • Positive and negative terminal output current monitors
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
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<2 lbs.
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<2 lbs.
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+/- 500V

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+/- 500V

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1kV

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1kV

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10mA

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10mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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Model Name

ESC1

Dimensions

3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)

Weight

<2 lbs.
(0.9 kg)

Bipolar
array(1) { ["#markup"]=> string(33) "

+/- 500V

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+/- 500V

DC Input Voltage
array(1) { ["#markup"]=> string(5) "24VDC" }
24VDC
DC Input Current
array(1) { ["#markup"]=> string(29) "

0.5A typical, 1A max.

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0.5A typical, 1A max.

Max. Current
array(1) { ["#markup"]=> string(29) "

10mA

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10mA

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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ESC Series Electrostatic Chuck Power Supplies

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+/- 1000V

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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ESC Series Electrostatic Chuck Power Supplies

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Industry Standard Interface
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  • Industry Standard Interface
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  • Output to input isolation: > 500 Meg ohm 
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  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
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  • DC output: MHV connectors on HV terminals, BNC on center tap
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  • Output to input isolation: > 500 Meg ohm 
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • Continuously variable output voltage and output current limit
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  • Output voltage (differential) monitor and center tap voltage monitor
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
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3.5"H x 8"W x 6.25"D
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<2 lbs.
(0.9 kg)

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<2 lbs.
(0.9 kg)

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+/- 1000V

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+/- 1000V

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2kV

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2kV

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3mA

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3mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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<2 lbs.
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<2 lbs.
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<2 lbs.
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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Industry Standard Interface
  • Designed for Volume Manufacturing
  • Intermediate voltages available, consult factory for more information.
  • Flexible Packaging Options:
    Refer to "Standard" model specifications for input line requirements, output voltage, current, regulation and cooling
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  • Industry Standard Interface
  • Designed for Volume Manufacturing
  • Intermediate voltages available, consult factory for more information.
  • Flexible Packaging Options:
    Refer to "Standard" model specifications for input line requirements, output voltage, current, regulation and cooling
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • All control features are available local (front panel) and remote (25-pin D type connector)
  • All analog setpoint and monitor signals are available as 0-10V full scale, fully differential. Inputs are 200k ohm minimum. Outputs are capable of driving 1k ohm at 10V maximum.
  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector
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  • All control features are available local (front panel) and remote (25-pin D type connector)
  • All analog setpoint and monitor signals are available as 0-10V full scale, fully differential. Inputs are 200k ohm minimum. Outputs are capable of driving 1k ohm at 10V maximum.
  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
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3.5"H x 8"W x 6.25"D
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<2 lbs.
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<2 lbs.
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+/- 1000V

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+/- 1000V

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2kV

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2kV

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3mA

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3mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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+/- 1000V

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2kV

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Output to input isolation: > 500 Meg ohm 
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
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<2 lbs.
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<2 lbs.
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+/- 1000V

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+/- 1000V

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2kV

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2kV

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3mA

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3mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Industry Standard Interface
  • Designed for Volume Manufacturing
  • Intermediate voltages available, consult factory for more information.
  • Flexible Packaging Options:
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  • Industry Standard Interface
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  • Intermediate voltages available, consult factory for more information.
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
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3.5"H x 8"W x 6.25"D
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<2 lbs.
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<2 lbs.
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+/- 1000V

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+/- 1000V

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2kV

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2kV

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3mA

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3mA

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+/- 1000V

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Model Name

ESC2

Dimensions

3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)

Weight

<2 lbs.
(0.9 kg)

Bipolar
array(1) { ["#markup"]=> string(34) "

+/- 1000V

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+/- 1000V

DC Input Voltage
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24VDC
DC Input Current
array(1) { ["#markup"]=> string(29) "

0.5A typical, 1A max.

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0.5A typical, 1A max.

Max. Current
array(1) { ["#markup"]=> string(28) "

3mA

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3mA

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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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+/- 1500V

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3kV

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Reduced risk of permanent charge on chuck through output polarity reversal
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
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  • Output to input isolation: > 500 Meg ohm 
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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+/- 1500V

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+/- 1500V

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3kV

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3kV

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2mA

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2mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Output linearity: Better than 1% full scale
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  • Output to input isolation: > 500 Meg ohm 
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • Positive and negative terminal output current monitors
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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+/- 1500V

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3kV

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3kV

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2mA

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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ESC Series Electrostatic Chuck Power Supplies

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+/- 1500V

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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ESC Series Electrostatic Chuck Power Supplies

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<2 lbs.
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+/- 1500V

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3kV

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2mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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2mA

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2mA

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
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  • Built-in RF filtering available.
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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
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  • Industry Standard Interface
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  • Industry Standard Interface
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
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  • Output to input isolation: > 500 Meg ohm 
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  • Output voltage balance: Better than 1% for matched loads
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  • DC output: MHV connectors on HV terminals, BNC on center tap
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  • Cooling: None required
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  • Positive and negative terminal output current monitors
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)

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3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)

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<2 lbs.
(0.9 kg)

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<2 lbs.
(0.9 kg)

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+/- 1500V

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+/- 1500V

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3kV

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3kV

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2mA

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2mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering available.
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  • Industry Standard Interface
  • Designed for Volume Manufacturing
  • Intermediate voltages available, consult factory for more information.
  • Flexible Packaging Options:
    Refer to "Standard" model specifications for input line requirements, output voltage, current, regulation and cooling
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  • Industry Standard Interface
  • Designed for Volume Manufacturing
  • Intermediate voltages available, consult factory for more information.
  • Flexible Packaging Options:
    Refer to "Standard" model specifications for input line requirements, output voltage, current, regulation and cooling
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • Output to input isolation: > 500 Meg ohm 
  • Output regulation: 1% or better of output from 0 to full load
  • Output ripple: Less than 2%
  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
  • Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
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  • All control features are available local (front panel) and remote (25-pin D type connector)
  • All analog setpoint and monitor signals are available as 0-10V full scale, fully differential. Inputs are 200k ohm minimum. Outputs are capable of driving 1k ohm at 10V maximum.
  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector
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  • All control features are available local (front panel) and remote (25-pin D type connector)
  • All analog setpoint and monitor signals are available as 0-10V full scale, fully differential. Inputs are 200k ohm minimum. Outputs are capable of driving 1k ohm at 10V maximum.
  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)

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3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)

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<2 lbs.
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<2 lbs.
(0.9 kg)

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+/- 1500V

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+/- 1500V

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3kV

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3kV

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2mA

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2mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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+/- 1500V

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Model Name

ESC3

Dimensions

3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)

Weight

<2 lbs.
(0.9 kg)

Bipolar
array(1) { ["#markup"]=> string(34) "

+/- 1500V

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+/- 1500V

DC Input Voltage
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24VDC
DC Input Current
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0.5A typical, 1A max.

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0.5A typical, 1A max.

Max. Current
array(1) { ["#markup"]=> string(28) "

2mA

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2mA

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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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+/- 2000V

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+/- 2000V

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0.5A typical, 1A max.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Industry Standard Interface
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  • Industry Standard Interface
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  • Output to input isolation: > 500 Meg ohm 
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
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  • Output linearity: Better than 1% full scale
  • Output voltage balance: Better than 1% for matched loads
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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+/- 2000V

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+/- 2000V

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1mA

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1mA

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0.5A typical, 1A max.

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0.5A typical, 1A max.

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<2 lbs.
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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Output linearity: Better than 1% full scale
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  • Output to input isolation: > 500 Meg ohm 
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  • All control features are available local (front panel) and remote (25-pin D type connector)
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  • Positive and negative terminal output current monitors
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ESC Series Electrostatic Chuck Power Supplies

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ESC Series Electrostatic Chuck Power Supplies

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+/- 2000V

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1mA

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
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ESC Series Electrostatic Chuck Power Supplies

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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