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Read the Case StudyESC-HV Electrostatic Chuck Power Supplies
1-15 kV Models, Industry Standard Interface, designed for volume manufacturing and available with selectable features and flexible packaging option.
Performance
Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.
Models
Model Name
ESC1
Dimensions
3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)
Weight
<2 lbs.
(0.9 kg)
Bipolar
+/- 500V
Unipolar
1kV
Max. Current
10mA
Line Voltage
24VDC
Line Current
0.5A typical, 1A max.
Model Name
ESC2
Dimensions
3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)
Weight
<2 lbs.
(0.9 kg)
Bipolar
+/- 1000V
Unipolar
2kV
Max. Current
3mA
Line Voltage
24VDC
Line Current
0.5A typical, 1A max.
Model Name
ESC3
Dimensions
3.5"H x 8"W x 6.25"D
(9cm x 20.4cm x 15.9cm)
Weight
<2 lbs.
(0.9 kg)
Bipolar
+/- 1500V
Unipolar
3kV
Max. Current
2mA
Line Voltage
24VDC
Line Current
0.5A typical, 1A max.
Model Name
ESC4
Dimensions
3.5"H x 8"W x 7.5"D
(9cm x 20.4cm x 19.1cm)
Weight
<2 lbs.
(0.9 kg)
Bipolar
+/- 2000V
Unipolar
N/A
Max. Current
1mA
Line Voltage
24VDC
Line Current
0.5A typical, 1A max.
Model Name
ESC-HVXP
Dimensions
3.5"H x 7.5"W x 12.5"D
(9cm x 19.1cm x 31.8cm)
Weight
<4 lbs.
(1.81 kg)
Bipolar
+/- 2.5 to 7.5kV
Unipolar
5-15kV
Max. Current
1mA
Line Voltage
24VDC
Line Current
0.5A typical, 1A max.
Features
- Reduced risk of permanent charge on chuck through output polarity reversal
- Low stored energy and built-in current limitations to safeguard from surges and arcs
- Short circuit and open circuit proof design for enhanced reliability
- Built-in RF filtering available.
Applications
The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.
Specifications
- Output to input isolation: > 500 Meg ohm
- Output regulation: 1% or better of output from 0 to full load
- Output ripple: Less than 2%
- Output linearity: Better than 1% full scale
- Output voltage balance: Better than 1% for matched loads
- Line input requirements: Single 24VDC @ 1 A typical (1A maximum)
- DC power input: 3-pin Molex type, non-reversible quick disconnect
- DC output: MHV connectors on HV terminals, BNC on center tap
- Remote interface: 25-pin D type female (DB-25f)
- Cooling: None required
- Compliance: 1-3 kV models ETL Marked for product safety and CE compliant