High Frequency RF Power Supplies

Our High Frequency RF Power Supplies are designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering and PECVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

The CB series is the culmination of 45 years of RF plasma and heating experience. We have taken the proven rugged design of the CX series power amplifier section and combined it with all the innovation in DC supplies and diagnostics to make a compact, stable  RF power supply without compromising reliability for size.  These single frequency RF power supplies operate in the HF band (3.39MHz to 30MHz) still benefiting from Comdel’s “S” technology

Operating at frequencies from 30MHz to 81MHz, the CVB series provides reliable VHF power into plasma and industrial processes.  CVB generators use broadband, low-“Q” amplifiers to reduce the possibility of RF system instabilities in your system. 

The CX platform has proven to be the benchmark in the semiconductor industry for value and reliability. These high frequency (HF) generators operate at a single frequency from 3.39MHz to 30MHz. A frequency agile option allows fast frequency tuning in a range +/-10% of the center frequency.

The unsurpassed MTBF of the CX series brings the cost of ownership to a very low level. These generators were the first to incorporate Comdel’s patented “S” technology in power amplifier design.  This design enhances system stability and increases the life of the RF delivery system.

CXH generators can handle whatever your process can dish out. These hybrid generators use the time –proven CX RF generators as their solid state drivers to produce stable, bullet proof power into any load. The high-µ grounded grid triode in the generator’s final stage produces power into unstable loads like plasma torches and dielectric heating.

These power amplifiers offer a reliable replacement for old tube oscillators supplies. Their operation into 50 OHM loads produce highly accurate power control. 

Available for High Frequency RF Power Supply Series:

Turbotune Technology

Optimal Frequency Agile Tuning for High Performance RF Plasma Systems

Optional Turbotune Technology available on all RF products providing frequency tuning for maximum energy transfer with improved speed and reliability.
Learn more about Turbotune Technology

 

S-Technology Amplifier Gain

"S" Technology

S-Technology is a patented, unique amplifier design that makes the gain of the power amplifiers in Comdel "S" generators constant rather than dependent upon load conditions.
Learn more about S Technology