Match Pro Impedance Matching Networks
All Match Pro impedence matching networks are engineered with XP Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between XP Comdel's Match Pro and other matching networks. The Match Pro adjusts input impedance to 50 Ohms quickly, accurately and dependably—in response to the changes in load characteristics during your process. The Match Pro operates over a power range from 50 to 50,000 Watts.
CPM-1000
5"H x 12"W x 8"D
(12.7cm x 30.5cm x 20.3cm)
8 lbs.
(3.6 kg)
Forced air
115/208/230VAC, single phase, 2.5A
600w, 1000w and 1250w
10A
CPMX-1000
5.5"H x 10"W x 15"D
(13.97cm x 25.4cm x 38.1cm)
12 lbs.
(5.5 kg)
Forced air
100-240VAC, single phase or 24VDC, 2.5A
600w, 1000w and 1250w
15A
CPMX-2500
5"H x 10"W x 12"D
(12.7cm x 25.4cm x 30.5cm)
16 lbs.
(7.3 kg)
Water or forced air
100-240VAC, single phase or 24VDC, 2.5A
600W, 1000W, 1250W, 2000W and 2500W
50A
CPMX-6000
7"H x 12.75"W x 16"D
(17.8cm x 32.4cm x 40.6cm)
24 lbs.
(11 kg)
Water or Forced Air
100-240VAC, single phase or 24VDC, 2.5A
2500w, 4000w, 5000w, 8000w and 10kW
100A
- Automatic and manual modes with local and remote manual control of tuning capacitors
- Ability to pre-position capacitors to optimal plasma ignition point prior to turn on, resulting in quick and reliable tuning
- Capacitor position outputs to show where the match occurs from process to process
- High power, H-bridge, Mosfet motor drive circuitry is conservatively rated for improved reliability
- XP Comdel engineers will map the impedance of your active chamber to determine the custom design and optimal tuning elements for your process requirements.
- Frequency range: Configured to operate from 2 to 80 MHz
- Line input voltage/power: 115/208/230VAC; single phase; 50/60 Hz (other input voltages may be special ordered) 50 Watts maximum power required while tuning
- VSWR: Typically less than 1.5 to 1 in a 50-Ohm system
- Cooling: Forced air or water cooling is employed as dictated by network operating "Q" and power level. Operating ambient temperature range is -10 to +35° C
- Mounting: The Match Pro unit must be mounted close to the chamber for optimum performance. Custom mounting configurations are accommodated.