Performance:
The CDX dual frequency RF generator comes in a 1000 or 2000 watt design. The high frequency (HF) section of the CDX provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz to 2 MHz.

Applications:
This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing.

Features:

• Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements
  
• Complies to CE-Mark standards and is ETL Marked and SEMI F47 compliant
  
• Protection circuits safeguard the amplifiers from over-voltage, over-current and over-power operating conditions
  
• Gain-control circuitry stabilizes output power against line and load variations, and limits power during high VSWR conditions
  
• Unique power monitoring in the low-frequency section measures delivered power into any impedance load
  
• Optional phase locked output in the low- frequency section eliminates the need for a matching network in many applications
  
  

Generator Specifications:

• AC input voltage: 187-229 VAC; three phase; 50/60 Hz
• Line current protection: 20A
• Analog setpoint and readback levels: 0-10VDC for 0-100% rated power
• Over-temperature fault: Output disabled when heatsink temp exceeds 60 degrees C
• Control signals' input impedance: 100k ohms, minimum
• Control signals' input isolation: 100VAC minimum to AC supply line
• Output power control linearity: 2% or better
• Forward/Delivered power regulation: +/- 2% of setpoint for load var. within VSWR foldback limits
• Load mismatch: Output limited to 200 watts under high VSWR conditions
• Line regulation: +/- 1% output change over 187-229VAC line voltage
• Control I/O connector: 15-pin subminiature D type
• Standard available output connector: N or C
  
• Cooling: CDX 1000: 1 GPM (3.8 liters), CDX 2000: 1.5 GPM (5.7 liters)
• Size: 7"H x 19"W x 19"D (17.8cm x 48.3cm x 48.3cm)
• Weight: 97 lbs. (44 kg)
  

HF Section:

• Output power: CDX 1000: 600 watts max. continuous into 50-ohm load, CDX 2000: 1000 watts max. continuous into 50-ohm load
  
• Frequency: Any fixed frequency from 2 to 60 MHz
  
• Frequency stability: +/- 0.005%
• Harmonic distortion: All harmonics minimum -30dB with respect to fundamental
  from 10-100% output power
  

LF Section:

• Output power: CDX 1000: 600 watts max. continuous into 50-ohm load, CDX 2000: 1000 watts max. continuous into 50-ohm load
• Frequency: Any fixed frequency from 20 kHz to 2 MHz or 25% variable
• Frequency stability: +/- 1%
• Harmonic distortion: All harmonics minimum -40dB with respect to fundamental from 10-100% output power