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Performance:
Comdel's ESC suite of electrostatic chuck power supplies
offer the most stable electrical design with the ultimate
in package flexibility. These compact, lightweight chuck supplies
come complete with NRTL product safety marks, built-in RF
filters for device protection and unsurpassed clamping for
electrostatic wafer processing applications.
Applications:
The ESC series voltage sources provide stable power for
electrostatic chucks used in semiconductor wafer transfer.
New!
ESC-HV High Power Chuck Supplies for
Large Surface Handling
Click
here to learn more
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Features:
- Reduced risk of permanent charge on chuck through output polarity reversal
- Low stored energy and built-in current limitations to safeguard from surges and arcs
- Short circuit and open circuit proof design for enhanced reliability
- ETL Marked for product safety and CE compliant
- Built-in RF filtering
Options:
Flexible packaging options available
- ESC OEM: Imbedded model
- ESC Dual: Single output connector and built-in voltage and current monitor
- ESC Mini: X-small package design
(2.5"H x 4.75"W x 9.5"D)
- ESC 5: 5kV unipolar output (available in positive or negative polarity)
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ESC “Standard” Specifications:
- Output to input isolation: > 500
Meg ohm
- Output voltage/current:
|
|
ESC
1 |
ESC
2 |
ESC
3 |
ESC
5 |
| Bipolar |
+/- 500V
|
+/- 1000V
|
+/- 1500V
|
N/A
|
| Unipolar |
1kV
|
2kV
|
3kV
|
5kV
|
| Max.
Current |
10 mA
|
3 mA
|
2 mA
|
1 mA
|
|
- Output regulation: 0.1% or better of
output from 0 to full load
- Output ripple: Less than 0.2%
- Output linearity: Better than 0.1% full
scale
- Output voltage balance: Better than
0.5% for matched loads
- Line input requirements: Single 24VDC
@ 0.5A typical (1A maximum)
- DC power input: 3-pin Molex type, non-reversible
quick disconnect
- DC output: MHV connectors on HV terminals,
BNC on center tap
- Remote interface: 25-pin D type female
(DB-25f)
- Cooling: None required
- Compliance: ETL Marked for product safety
and CE compliant
Controls:
- All control features are available local
(front panel) and remote (25-pin D type connector)
- All analog setpoint and monitor signals
are available as 0-10V full scale, fully differential. Inputs
are 200k ohm minimum. Outputs are capable of driving 1k
ohm at 10V maximum.
- All command lines and status indicators
are uncommitted, optically isolated digital signals.
- Continuously variable output voltage
and output current limit
- Hi-voltage enable command and enabled
indicator
- Output polarity reversal command and
discharge command (auto or manual)
- Output voltage (differential) monitor
and center tap voltage monitor
- Positive and negative terminal output
current monitors
- Output protection: active voltage and
current limits in addition to passive output limiting impedance
- RS-232c serial interface for all remote
control functions; nine-pin D type male connector
Mechanical Specifications:
- Size: 3.5"H x 8"W x 6.25"D
(9cm x 20.3cm x 16cm)
- Weight: < 2 lbs. (0.9 kg)
ESC Product Matrix
| Model
Name |
Output
Type |
Output
Polarity |
Output
Voltage |
Output
Current |
| ESC-1 |
Bipolar (reversible)
|
N/A
|
+/- 500V
|
1 mA
|
| ESC-1
/ 10m |
Bipolar (reversible)
|
N/A
|
+/- 500V
|
10 mA
|
| ESC-2 |
Bipolar (reversible)
|
N/A
|
+/- 1000V
|
3 mA
|
| ESC-2J |
Bipolar (reversible)
|
N/A
|
+/- 1500V
|
6.5 mA
|
| ESC-2D |
Single (reversible)
|
N/A
|
2000V
|
3 mA
|
| ESC-3 |
Bipolar (reversible)
|
N/A
|
+/- 1500V
|
2 mA
|
| ESC-3D |
Single (reversible)
|
N/A
|
3000V
|
2 mA
|
| ESC-3D/Bias |
Single (reversible)
|
N/A
|
3000V
|
2 mA
|
| ESC-3U/Neg |
Single (fixed)
|
Negative
|
3000V
|
2 mA
|
| ESC-3U/Pos |
Single (fixed)
|
Positive
|
3000V
|
2 mA
|
| ESC-3L |
Bipolar (reversible)
|
N/A
|
+/- 1500V
|
100 uA
|
| ESC-5U/Neg |
Single (fixed)
|
Negative
|
5000V
|
1 mA
|
| ESC-5U/Pos |
Single (fixed)
|
Positive
|
5000V
|
1 mA
|
| ESC-HV/6 |
Bipolar (fixed)
|
N/A
|
+/- 3000V
|
2 mA
|
| ESC-HV/10 |
Bipolar (fixed)
|
N/A
|
+/- 5000V *
|
2 mA
|
| ESC-OEM |
Bipolar (reversible)
|
N/A
|
Varies
|
Varies
|
| ESC-Mini |
Bipolar (reversible)
|
N/A
|
+/- 1500V
|
2 mA
|
| ET-10K |
3 section RF trap
|
N/A
|
N/A
|
N/A
|
| ET-10K/Mini |
3 section RF trap
|
N/A
|
N/A
|
N/A
|
* With resect to chassis. Does not have
a center tap.
Flexible Packaging Options:
Refer to "Standard" model specifications for
input line requirements, output voltage, current, regulation
and cooling for all of the following:
ESC OEM
- 1, 2 & 3 kV models available
- Imbedded model with analog control and
RS-232
- ETL Marked for product safety and CE
compliant
ESC Dual
- 1, 2 & 3 kV models available
- Single output for connection simplicity
- Automatic or manual polarity reversal
switching
- Built-in voltage and current monitor
- Optional bias/offset feature
- ETL Marked for product safety and CE
compliant
ESC Mini
- 1, 2 & 3 kV models available
- Imbedded model with analog control and
RS232
- X-small package design (2.5"H x
4.75"W x 9.5"D / 6.4cm x 12cm x 24cm)
- 15-pin D type connector for power input
and control
ESC 5
- 5kV power output
- Small package design (3 1/2" half
rack)
- Unipolar output (available in positive
or negative polarity)
- ETL Marked for product safety
ET 10K External Filter:
- 1 to 10 kW external RF filter (1000V
RMS)
- Can be mounted close to chamber while
controls can be accessed from 50' cable length away
- Standard packaging for rack-mount and
chassis-mount applications
(3.5"H x 8"W x 6.25"D / 9cm x 20.3cm x 16cm)
- Ultra-small packaging for buried applications
(1.65"H x 5.45"W x 4.35"D / 4.2cm x 13.8cm
x 11cm)
- MHV connectors
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