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ESC Series Electrostatic
Chuck Power Supplies

1-5 kV Models, Available with
Selectable Features and Flexible
Packaging Options

ESC Electrostatic Chuck Power Supply

Performance:
Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

Applications:
The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

New!
ESC-HVXP High Expanded Performance, High Voltage, Electrostatic Chuck

Click here to learn more

Features:

  • Reduced risk of permanent charge on chuck through output polarity reversal
  • Low stored energy and built-in current limitations to safeguard from surges and arcs
  • Short circuit and open circuit proof design for enhanced reliability
  • Built-in RF filtering


Options:
Intermediate voltages available, consult factory for more information.

Flexible packaging options available

  • ESC OEM: Imbedded model
  • ESC Dual: Single output connector and built-in voltage and current monitor
  • ESC Mini: X-small package design
    (2.5"H x 4.75"W x 9.5"D)
  • ESC 5: 5kV unipolar output (available in positive or negative polarity)


ESC “Standard” Specifications:

  • Output to input isolation: > 500 Meg ohm
  • Output voltage/current:


ESC 1ESC 2ESC 3ESC 4ESC 5
Bipolar

+/- 500V

+/- 1000V

+/- 1500V

+/- 2000V

Consult Factory

Unipolar

1kV

2kV

3kV

N/A

5kV

Max. Current

10 mA

3 mA

2 mA

1 mA

1 mA

  • Output regulation: 0.1% or better of output from 0 to full load
  • Output ripple: Less than 0.2%
  • Output linearity: Better than 0.1% full scale
  • Output voltage balance: Better than 0.5% for matched loads
  • Line input requirements: Single 24VDC @ 0.5A typical (1A maximum)
  • DC power input: 3-pin Molex type, non-reversible quick disconnect
  • DC output: MHV connectors on HV terminals, BNC on center tap
  • Remote interface: 25-pin D type female (DB-25f)
  • Cooling: None required
  • Compliance: 1-3 kV models ETL Marked for product safety and CE compliant


Controls:

  • All control features are available local (front panel) and remote (25-pin D type connector)
  • All analog setpoint and monitor signals are available as 0-10V full scale, fully differential. Inputs are 200k ohm minimum. Outputs are capable of driving 1k ohm at 10V maximum.
  • All command lines and status indicators are uncommitted, optically isolated digital signals.
  • Continuously variable output voltage and output current limit
  • Hi-voltage enable command and enabled indicator
  • Output polarity reversal command and discharge command (auto or manual)
  • Output voltage (differential) monitor and center tap voltage monitor
  • Positive and negative terminal output current monitors
  • Output protection: active voltage and current limits in addition to passive output limiting impedance
  • RS-232c serial interface for all remote control functions; nine-pin D type male connector


Mechanical Specifications:

ESC 1, 2, 3, 5:

  • Size: 3.5"H x 8"W x 6.25"D (9cm x 20.4cm x 15.9cm)
  • Weight: < 2 lbs. (0.9 kg)

ESC 4:

  • Size: 3.5"H x 8"W x 7.5"D (9cm x 20.4cm x 19.1cm)
  • Weight: < 2 lbs. (0.9 kg)


ESC Product Matrix

Model Name Output Type Output Polarity Output VoltageOutput Current
ESC-1

Bipolar

Reversible

+/- 500V

1 mA

ESC-1 / 10m

Bipolar

Reversible

+/- 500V

10 mA

ESC-2

Bipolar

Reversible

+/- 1000V

3 mA

ESC-2J

Bipolar

Reversible

+/- 1500V

6.5 mA

ESC-2D

Single

Reversible

2000V

3 mA

ESC-3

Bipolar

Reversible

+/- 1500V

2 mA

ESC-3D

Single

Reversible

3000V

2 mA

ESC-3D/Bias

Single

Reversible

3000V

2 mA

ESC-3U/Neg

Single (fixed)

Negative

3000V

2 mA

ESC-3U/Pos

Single (fixed)

Positive

3000V

2 mA

ESC-3L

Bipolar

Reversible

+/- 1500V

100 uA

ESC-4

Bipolar

Reversible

+/- 2000V

1 mA

ESC-5U/Neg

Single (fixed)

Negative

5000V

1 mA

ESC-5U/Pos

Single (fixed)

Positive

5000V

1 mA

ESC-HV/6

Bipolar

Fixed (reversable option available)

+/- 3000V

2 mA

ESC-HV/10

Bipolar (fixed)

Fixed (reversable option available)

+/- 5000V *

2 mA

ESC-HV/15 Bipolar Reversible +/-7500V 1 mA
ESC-OEM

 

Reversible

Varies

Varies

ESC-Mini

 

Reversible

+/- 1500V

2 mA

ET-10K

3 section RF trap

N/A

N/A

N/A

ET-10K/Mini

3 section RF trap

N/A

N/A

N/A

* With resect to chassis. Does not have a center tap.

Flexible Packaging Options:
Refer to "Standard" model specifications for input line requirements, output voltage, current, regulation and cooling for all of the following:

ESC OEM

  • 1, 2 & 3 kV models available
  • Imbedded model with analog control and RS-232
  • ETL Marked for product safety and CE compliant


ESC Dual

  • 1, 2 & 3 kV models available
  • Single output for connection simplicity
  • Automatic or manual polarity reversal switching
  • Built-in voltage and current monitor
  • Optional bias/offset feature
  • ETL Marked for product safety and CE compliant


ESC Mini

  • 1, 2 & 3 kV models available
  • Imbedded model with analog control and RS232
  • X-small package design (2.5"H x 4.75"W x 9.5"D / 6.4cm x 12cm x 24cm)
  • 15-pin D type connector for power input and control


ESC 5

  • 5kV power output
  • Small package design (3 1/2" half rack)
  • Unipolar output (available in positive or negative polarity)


ET 10K External Filter:

  • 1 to 10 kW external RF filter (1000V RMS)
  • Can be mounted close to chamber while controls can be accessed from 50' cable length away
  • Standard packaging for rack-mount and chassis-mount applications
    (3.5"H x 8"W x 6.25"D / 9cm x 20.4cm x 15.9cm)
  • Ultra-small packaging for buried applications
    ( 1.65"H x 5.45"W x4.35"D / 4.2cm x 13.8cm x 11cm)
  • MHV connectors

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