Performance:
Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

Applications:
The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.

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ESC-HV High Power Chuck Supplies for
Large Surface Handling
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Features:

• Reduced risk of permanent charge on chuck through output polarity reversal
  
• Low stored energy and built-in current limitations to safeguard from surges and arcs
  
• Short circuit and open circuit proof design for enhanced reliability
  
• Built-in RF filtering
  

Options:
Intermediate voltages available, consult factory for more information.

Flexible packaging options available

• ESC OEM: Imbedded model
  
• ESC Dual: Single output connector and built-in voltage and current monitor
  
• ESC Mini: X-small package design
  (2.5"H x 4.75"W x 9.5"D)
  
• ESC 5: 5kV unipolar output (available in positive or negative polarity)
  
  

ESC “Standard” Specifications:

• Output to input isolation: > 500 Meg ohm
• Output voltage/current:
  

• Output regulation: 0.1% or better of output from 0 to full load
• Output ripple: Less than 0.2%
• Output linearity: Better than 0.1% full scale
• Output voltage balance: Better than 0.5% for matched loads
• Line input requirements: Single 24VDC @ 0.5A typical (1A maximum)
• DC power input: 3-pin Molex type, non-reversible quick disconnect
  
• DC output: MHV connectors on HV terminals, BNC on center tap
  
• Remote interface: 25-pin D type female (DB-25f)
  
• Cooling: None required
  
• Compliance: 1-3 kV models ETL Marked for product safety and CE compliant
  

Controls:

• All control features are available local (front panel) and remote (25-pin D type connector)
  
• All analog setpoint and monitor signals are available as 0-10V full scale, fully differential. Inputs are 200k ohm minimum. Outputs are capable of driving 1k ohm at 10V maximum.
  
• All command lines and status indicators are uncommitted, optically isolated digital signals.
  
• Continuously variable output voltage and output current limit
  
• Hi-voltage enable command and enabled indicator
  
• Output polarity reversal command and discharge command (auto or manual)
  
• Output voltage (differential) monitor and center tap voltage monitor
  
• Positive and negative terminal output current monitors
• Output protection: active voltage and current limits in addition to passive output limiting impedance
  
• RS-232c serial interface for all remote control functions; nine-pin D type male connector
  

Mechanical Specifications:

ESC 1, 2, 3, 5:

• Size: 3.5"H x 8"W x 6.25"D (9cm x 20.4cm x 15.9cm)
  
• Weight: < 2 lbs. (0.9 kg)

ESC 4:

• Size: 3.5"H x 8"W x 7.5"D (9cm x 20.4cm x 19.1cm)
  
• Weight: < 2 lbs. (0.9 kg)

ESC Product Matrix

* With resect to chassis. Does not have a center tap.

Flexible Packaging Options:
Refer to "Standard" model specifications for input line requirements, output voltage, current, regulation and cooling for all of the following:

ESC OEM

• 1, 2 & 3 kV models available
  
• Imbedded model with analog control and RS-232
  
• ETL Marked for product safety and CE compliant
  

ESC Dual

• 1, 2 & 3 kV models available
  
• Single output for connection simplicity
  
• Automatic or manual polarity reversal switching
  
• Built-in voltage and current monitor
  
• Optional bias/offset feature
  
• ETL Marked for product safety and CE compliant
  

ESC Mini

• 1, 2 & 3 kV models available
  
• Imbedded model with analog control and RS232
  
• X-small package design (2.5"H x 4.75"W x 9.5"D / 6.4cm x 12cm x 24cm)
  
• 15-pin D type connector for power input and control
  

ESC 5

• 5kV power output
  
• Small package design (3 1/2" half rack)
  
• Unipolar output (available in positive or negative polarity)

ET 10K External Filter:

• 1 to 10 kW external RF filter (1000V RMS)
  
• Can be mounted close to chamber while controls can be accessed from 50' cable length away
  
• Standard packaging for rack-mount and chassis-mount applications
  (3.5"H x 8"W x 6.25"D / 9cm x 20.4cm x 15.9cm)
  
• Ultra-small packaging for buried applications
  ( 1.65"H x 5.45"W x4.35"D / 4.2cm x 13.8cm x 11cm)
  
• MHV connectors