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Match Pro Impedance Matching Networks
Automatic Ultra-Fast Tuning and Fine Tune Resolution Deliver Repeatable Process Results
Match Pro Impedance Matching Network

Performance:
Every Match Pro system is engineered with Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between Comdel's Match Pro and other matching networks. The Match Pro adjusts input impedance to 50 ohms quickly, accurately and dependably--in response to the changes in load characteristics during your process.

The Match Pro series of matching networks are manufactured at power levels ranging from 25 to 80,000 watts.

New!
CPMX1000 Match Pro
Automatic Tuning Network

Click here to learn more

CPMX6000 Match Pro
Automatic Tuning Network

Click here to learn more

Features:

  • Automatic and manual modes with local and remote manual control of tuning capacitors
  • Ability to pre-position capacitors to optimal plasma ignition point prior to turn-on, resulting in quick and reliable tuning
  • Capacitor position outputs to show where the match occurs from process to process
  • High power, H-bridge, Mosfet motor drive circuitry is conservatively rated for improved reliability

Custom Configurations:
To optimize the tuning range of the Match Pro system, Comdel engineers map the impedance of your active chamber. This mapping allows optimal tuning elements to be chosen for your process requirements. Customization assures that you receive the voltage and current handling capabilities, tuning range, tuning time and physical size required.

Options:
NEW! Arc Detect Fast Shutdown.
Automatic shutdown of the RF to minimize arc damage. An integrated system that works within the matching network and power supply to provide ultra fast shutdown in less than 1.5 microseconds. Available on all CPMX Matching Networks and CX Power Supplies. Click here to learn more.


General Specifications:

  • Frequency range: Configured to operate at fixed frequencies from 2 to 60 MHz
  • Line input voltage/power: 115/208/230VAC; single phase; 50/60 Hz; 24VDC
    (other input voltages may be special ordered) 50 watts maximum power required while tuning
  • VSWR: Typically less than 1.5 to 1 in a 50-ohm system
  • Cooling: Forced air or water cooling is employed as dictated by network operating "Q" and power level. Operating ambient temperature range is -10 to +35° C
  • Mounting: The Match Pro unit must be mounted close to the chamber for optimum performance. Custom mounting configurations are accommodated.


Standard Configurations:
Comdel engineers will map the impedance of your active chamber to determine the custom design and optimal tuning elements for your process requirements. However, Comdel's Match Pro networks are available in the following standard configurations:


CPMX-5000CPMX-2500CPM-1000*
Load current

50A

25A

8A

Size

8"H x 14.5"W
x 16"D
(20.3cm x 36.8cm x 40.6cm)

5"H x 10"W
x 12"D
(12.7cm x 25.4cm x 30.5cm)

5"H x 12"W
x 8"D
(12.7cm x 30.5cm x 20.3cm)

Weight

67 lbs.
(30.4 kg)

16 lbs.
(7.3 kg)

8 lbs.
(3.6 kg)

*Remote control included

Click Here for a smith chart diagram identifying the CPM-1000 tuning range and safe operating areas for 13.56 MHz.

Remote Control Unit:
The Comdel CPMX Remote was designed to provide remote control capability to any of the CPMX series Match Pro impedance matching networks. The unit monitors functions such as auto/manual mode, preset position, capacitor position and DC bias. It is housed in a compact 3.5"H x 9.5"W x 6.25"D (9cm x 24cm x 16cm) half-rack package and weighs approximately 3 lbs.

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