| Performance:
Comdel's VF series multi channel synthesizer modules provide phase adjustable
output to avoid destructive arcing and cross-talk in multiple cathode plasma processing
chambers. The VF series can accommodate up to 16 channels and may be programmed
to any frequency between 2 and 60 MHz. Frequency changes are simultaneous and
phase continuous. The phase of each channel can be adjusted to an accuracy greater
than 0.1 degree resolution. The VF series allows adjustment for cable length dependencies.
Applications:
The VF series is designed to meet the performance
demand in RF-driven plasma systems for semiconductor processing. Applications
include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as
induction and dielectric heating processes in industrial systems, and solar photovoltaic
applications. |  |
Features:
- Programmable
to any frequency between 2 and 60 MHz
- Ability to store
multiple phase offsets for batch processing
- Simultaneous
and phase continuous frequency changes
- Allows adjustment
for cable length dependencies
- Ability to automate tuning
process
- All channels can be individually programmed for
different frequencies
Options: - Customized
choice of up to 16 channels
- Local Operation or RS232
Operation
- Higher and lower frequency modules are available
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