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Performance:
Comdel's VF series multi channel synthesizer modules provide
phase adjustable output to avoid destructive arcing and cross-talk
in multiple cathode plasma processing chambers. The VF series
can accommodate up to 16 channels and may be programmed to
any frequency between 2 and 60 MHz. Frequency changes are
simultaneous and phase continuous. The phase of each channel
can be adjusted to an accuracy greater than 0.1 degree resolution.
The VF series allows adjustment for cable length dependencies.
Applications:
The VF series is designed to meet the performance demand in
RF-driven plasma systems for semiconductor processing. Applications
include etch, RIE, parallel plate, ICP, RF sputtering, CVD
and PVD, as well as induction and dielectric heating processes
in industrial systems, and solar photovoltaic applications.
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Features:
- Programmable to any frequency between
2 and 60 MHz
- Ability to store multiple phase offsets
for batch processing
- Simultaneous and phase continuous frequency
changes
- Allows adjustment for cable length dependencies
- Ability to automate tuning process
- All channels can be individually programmed
for different frequencies
Options:
- Customized choice of up to 16 channels
- Local Operation or RS232 Operation
- Higher and lower frequency modules are
available
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