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Performance:
RF generators from the CB product family are available
in power ranges from 50 to 5000 Watts with standard fixed
frequencies from 13.56 MHz to 60 MHz. The solid-state design
provides precise and repeatable power control, ultra-stable
output and low cost of ownership. The design of the CB series
is based on Comdel's proven RF amplifier technology.
Applications:
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
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Features:
- Small, lightweight packaging
- Standard power ranges: 50, 200, 300, 500, 600, 1000, 1250, 3000, 5000 Watts
- Standard fixed frequencies: 13.56 MHz,
27.12 MHz, 40.68 MHz, 60 MHz
- Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
- Designed to meet ETL and SEMI F47 directives
- Forward or Delivered power mode regulation
Options:
- 2 MHz & 3.39 MHz options available,
added package height required.
- High accuracy, low output control: +/-
1% of setpoint from 10-100% rated power
- Internal fixed match
- Master/Slave operation
- Frequency tuning
- DeviceNet
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