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CB Series High Frequency
RF Power Supplies

Comdel's Superior Design and Reliability
in a Small, Lightweight Package

CB Series RF Power Supplies

Performance:
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel's proven RF amplifier technology.

Applications:
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

Features:

  • Small, lightweight packaging
  • Standard power ranges: 50, 200, 300, 500, 600, 1000, 1250, 5000 Watts
  • Standard fixed frequencies: 13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz
  • Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
  • Designed to meet ETL and SEMI F47 directives
  • Forward or Delivered power mode regulation

Options:

  • 2 MHz & 3.39 MHz options available, added package height required.
  • High accuracy, low output control: +/- 1% of setpoint from 10-100% rated power
  • Internal fixed match
  • Master/Slave operation
  • Frequency tuning
  • DeviceNet

General CB Power Supply Specifications:
CB Series RF Power Supplies

  • Frequency: Any fixed frequency from 13.56 to 60 MHz
  • Frequency stability: +/- 0.005%
  • Line frequency: 50/60 Hz
  • Analog power command: 0-10 VDC for 0 to maximum output
  • Power accuracy: £ 2 %
  • Power linearity: £ 2% of setting at power levels above 10% of rated power
  • Power repeatability: +/- 1% of setpoint into a 50-ohm load
  • Control I/O connector: Standard: 15-pin subminiature D type (female), Optional: 25-pin subminiature D type (female)
  • Harmonic distortion: Less than -35 dBc
  • Reflected power limit: 20% of full scale typical


Facilities Specifications:

Model

Power OutputSizeWeight
CB50

50W

4"H x 5"W x 12"D
(10.2cm x 12.7cm x 30.5cm)

15 lbs.
(6.8 kg)

CB200

200W

4"H x 5"W x 12"D
(10.2cm x 12.7cm x 30.5cm)

15 lbs.
(6.8 kg)

CB300

300W

4"H x 5"W x 12"D
(10.2cm x 12.7cm x 30.5cm)

15 lbs.
(6.8 kg)

CB500

500W

4"H x 5"W x 12"D
(10.2cm x 12.7cm x 30.5cm)

15 lbs.
(6.8 kg)

CB600

600W

4"H x 5"W x 12"D
(10.2cm x 12.7cm x 30.5cm)

15 lbs.
(6.8 kg)

CB1000

1000W

5"H x 8"W x 16"D
(12.7cm x 20.3cm x 40.6cm)

35 lbs.
(16 kg)

CB1250

1250W

5"H x 8"W x 16"D
(12.7cm x 20.3cm x 40.6cm)

35 lbs.
(16 kg)

CB5000

5000W


5.25"H x 19"W x 22"D
(13.3cm x 48.3cm x 56cm)

95 lbs.
(43 kg)


Model

Line Voltage/Line CurrentCoolingStd. Output Connectors
CB50

110/208/230VAC; 1Ø /
0.9A/0.5A/0.4A typical

Water: 0.25 GPM
(0.95 liters)

N, C or BNC

CB200

110/208/230VAC; 1Ø /
4A/2A/1.5A typical

Water: 0.25 GPM
(0.95 liters)

N or C

CB300

110/208/230VAC; 1Ø /
5A/3A/2.5A typical

Water: 0.25 GPM
(0.95 liters)

N or C

CB500

110/208/230VAC; 1Ø /
9A/5A/4A typical

Water: 0.5 GPM
(2 liters)

N or C

CB600

110/208/230VAC; 1Ø /
11A/6A/5A typical

Water: 0.5 GPM
(2 liters)

N or C

CB1000

185-230VAC; 3Ø /
6A typical

Water: 1 GPM
(3.8 liters)

N or C

CB1250

185-230VAC; 3Ø /
7A typical

Water: 1 GPM
(3.8 liters)

N or C

CB5000

185-230VAC; 3Ø /
28A typical

Water: 3 GPM
(11.4 liters)

HN, LC or 7/16

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