RF generators from the CB product family are available in power ranges from
50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The
solid-state design provides precise and repeatable power control, ultra-stable
output and low cost of ownership. The design of the CB series is based on Comdel's
proven RF amplifier technology.
The CB series
is designed to meet the performance demand in RF-driven plasma systems for semiconductor
processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering,
CVD and PVD, as well as induction and dielectric heating processes in industrial
systems, and solar photovoltaic applications.
- Standard power ranges: 50, 200, 300,
500, 600, 1000, 1250, 5000 Watts
- Standard fixed frequencies:
13.56 MHz, 27.12 MHz, 40.68 MHz, 60 MHz
- Patented S-Technology
provides ultra-stable output. This stabilizing technology optimizes amplifier
performance, reducing power-gain changes caused by plasma impedance fluctuations.
- Designed to meet ETL and SEMI F47 directives
or Delivered power mode regulation
- 2 MHz & 3.39 MHz options available, added
package height required.
- High accuracy, low output control:
+/- 1% of setpoint from 10-100% rated power
- Master/Slave operation