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Performance:
RF generators from the CB product family are available
in power ranges from 50 to 5000 Watts with standard fixed
frequencies from 13.56 MHz to 60 MHz. The solid-state design
provides precise and repeatable power control, ultra-stable
output and low cost of ownership. The design of the CB series
is based on Comdel's proven RF amplifier technology.
Applications:
The CB series is designed to meet the performance demand
in RF-driven plasma systems for semiconductor processing.
Applications include etch, RIE, parallel plate, ICP, RF sputtering,
CVD and PVD, as well as induction and dielectric heating processes
in industrial systems, and solar photovoltaic applications.
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Features:
- Small, lightweight packaging
- Standard power ranges: 50, 200, 300,
500, 600, 1000, 1250, 5000 Watts
- Standard fixed frequencies: 13.56 MHz,
27.12 MHz, 40.68 MHz, 60 MHz
- Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
- Designed to meet ETL and SEMI F47 directives
- Forward or Delivered power mode regulation
Options:
- 2 MHz & 3.39 MHz options available,
added package height required.
- High accuracy, low output control: +/-
1% of setpoint from 10-100% rated power
- Internal fixed match
- Master/Slave operation
- Frequency tuning
- DeviceNet
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