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CLB
Series Low Frequency
RF Power Supplies
Comdel's
Superior Design and Reliability
in a Small, Lightweight Package
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| Performance:
RF generators from the CLB product family are available in power ranges from
2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The Turbotune
Technology within the unit allows frequency tuning by automatically varying its
output frequency +/-10% around its nominal frequency. The solid-state design provides
precise and repeatable power control, ultra-stable output and low cost of ownership.
The design of the CLB series is based on Comdel's proven RF amplifier technology.
Applications:
The CLB series is designed to meet the performance
demand in RF-driven plasma systems for semiconductor processing. Applications
include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as
induction and dielectric heating processes in industrial systems. | |
Features:
- Small,
lightweight packaging
- Standard power ranges: 2500, 3000,
5000, 6000, 12,000 Watts
- Any single frequency from 20
kHz to 2 MHz, varying +/-10%
- Phase lock tuning or software
algorithm
- Designed to meet ETL and SEMI F47 directives
- Forward or Delivered power mode regulation
Options:
- High accuracy, low output control
- Internal
fixed match
- DeviceNet
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General CLB Power Supply Specifications:
- Frequency: Any single frequency from 20 kHz to 2 MHz, varying
+/-10%
- Line frequency: 50/60 Hz
- Analog
power command: 0-10 VDC for 0 to maximum output
- Power
accuracy: £ 2 %
- Power
linearity: £ 2% of setting at power levels
above 10% of rated power
- Power repeatability: +/- 1%
of setpoint into a 50-ohm load
- Control I/O connector:
Standard: 25-pin subminiature D type (female), Optional: 15-pin subminiature D
type (female)
- Harmonic distortion: Less than -40 dBc
- Reflected power limit: 20% of full scale typical
Facilities Specifications:
|
|
Model | Power
Output | Size | Weight |
| CLB2500 |
2500W |
5"H x 17"W x 16"D
(12.7cm x 43.2cm
x 40.6cm) |
63 lbs.
(29 kg) |
| CLB3000 |
3000W |
5"H x 17"W x 16"D
(12.7cm x 43.2cm
x 40.6cm) |
63 lbs.
(29 kg) |
| CLB5000 |
5000W |
7"H x 19"W x 22"D
(17.8cm x 48.3cm
x 56cm) |
95 lbs.
(43 kg) |
| CLB6000 |
6000W |
7"H x 19"W x 22"D
(17.8cm x 48.3cm
x 56cm) |
95 lbs.
(43 kg) |
| CLB12K |
12000W |
10"H x 16"W x 32"D
(25.4cm x 40.6cm
x 81.2cm) |
145 lbs.
( 65.9 kg) |
|
Model | Line
Voltage/Line Current | Cooling | Std.
Output Connectors | | CLB2500 |
208/230/400/440/480VAC; 3Ø /
12A/11A/6A/5A/5A
typical |
Water: 2 GPM
(7.6 liters) |
N, C, HN, LC or 7/16 |
| CLB3000 |
208/230/400/440/480VAC; 3Ø /
12A/11A/6A/5A/5A
typical |
Water: 2 GPM
(7.6 liters) |
N, C, HN, LC or 7/16 |
| CLB5000 |
208/230/400/440/480VAC; 3Ø /
24A/22A/12A/10A/10A
typical |
Water: 3 GPM
(11.4 liters) |
N, C, HN, LC or 7/16 |
| CLB6000 |
208/230/400/440/480VAC; 3Ø /
24A/22A/12A/10A/10A
typical |
Water: 3 GPM
(11.4 liters) |
N, C, HN, LC or 7/16 |
| CLB12K |
208/230/400/440/480VAC; 3Ø /
48A/44A/24A/20A/20A
typical |
Water: 5 GPM
(18.9 liters) |
LC or 7/16 | | |
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