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Performance:
RF generators from the CLB product family are available
in power ranges from 2500 to 12,000 Watts with standard fixed
frequencies from 20 kHz to 2 MHz. The solid-state design provides
precise and repeatable power control, ultra-stable output
and low cost of ownership. The design of the CLB series is
based on Comdel's proven RF amplifier technology.
Applications:
The CB series is designed to meet the performance demand
in RF-driven plasma systems for semiconductor processing.
Applications include etch, RIE, parallel plate, ICP, RF sputtering,
CVD and PVD, as well as induction and dielectric heating processes
in industrial systems.
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Features:
- Small, lightweight packaging
- Standard power ranges: 3000, 5000, 6000,
12,000 Watts
- Standard fixed frequencies: 400 kHz,
2 MHz
- Phase lock tuning and software algorithm
- Designed to meet ETL and SEMI F47 directives
- Forward or Delivered power mode regulation
Options:
- Master/Slave operation
- Frequency tuning
- DeviceNet
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General CLB Power Supply Specifications:
- Frequency: Any fixed frequency
from 20 kHz to 2 MHz
- Frequency stability: +/- 0.005%
- Line frequency: 50/60 Hz
- Analog power command: 0-10 VDC for 0 to maximum output
- Power accuracy: £ 2 %
- Power linearity: £ 2% of setting at power levels above 10% of rated power
- Power repeatability: +/- 1% of setpoint into a 50-ohm load
- Control I/O connector: Standard:
25-pin subminiature D type (female), Optional: 15-pin
subminiature D type (female)
- Harmonic distortion: Less than
-40 dBc
- Reflected power limit: 20% of full scale typical
Facilities Specifications:
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Model
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Power
Output |
Size |
Weight |
| CLB3000 |
3000W
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5"H x 8"W x 16"D
(12.7cm x 20.3cm x 40.6cm)
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35 lbs.
(16 kg)
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| CLB5000 |
5000W
|
7"H x 19"W x 22"D
(17.8cm x 48.3cm x 56cm)
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95 lbs.
(43 kg)
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| CLB6000 |
6000W
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7"H x 19"W x 22"D
(17.8cm x 48.3cm x 56cm)
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95 lbs.
(43 kg)
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| CLB12K |
12000W
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10"H x 16"W x 32"D
(25.4cm x 40.6cm x 81.2cm)
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145 lbs.
( 65.9 kg)
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Model
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Line
Voltage/Line Current |
Cooling |
Std.
Output Connectors |
| CLB3000 |
208/230/400/440/480VAC; 3Ø
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12A/11A/6A/5A/5A typical
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Water: 2 GPM
(7.6 liters)
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N, C, HN, LC or 7/16
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| CLB5000 |
208/230/400/440/480VAC; 3Ø
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24A/22A/12A/10A/10A typical
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Water: 3 GPM
(11.4 liters)
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N, C, HN, LC or 7/16
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| CLB6000 |
208/230/400/440/480VAC; 3Ø
/
24A/22A/12A/10A/10A typical
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Water: 3 GPM
(11.4 liters)
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N, C, HN, LC or 7/16
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| CLB12K |
208/230/400/440/480VAC; 3Ø
/
48A/44A/24A/20A/20A typical
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Water: 5 GPM
(18.9 liters)
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LC or 7/16
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