Performance:
The CLX series low frequency RF power supplies are available in power ranges from 600 to 10,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.

Applications:
The CLX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Features:

• Reliable amplifier design with millions of trouble-free hours driving plasma systems worldwide
  
• Local control via encoder and softkey inputs
  
• Standard RS-232 and analog/digital control
  
• Control circuitry ensures consistency during high VSWR conditions
  
• Unique power monitoring measures delivered power into any impedance load
  
• Active front panel with full controls and programmable microprocessor
  

Options:

• Wide range of AC input line voltages available
  
• Master/Slave operation
  
• Turbotune Technology providing unique frequency tuning
  
• DeviceNet
  
  

General Specifications:

• Power control: 0-10 VDC input for 0 to maximum-rated output
  
• Power control linearity: £ 2% of setting at power levels above 10% of rated power
• Frequency: Any fixed frequency from 20 kHz to 2 MHz* (optional frequency agility +/- 10% of center frequency)
• Frequency stability: 350 kHz +/- 1%
  
  

* CLX 600/H Frequency: Any fixed frequency from 20 kHz to 800 kHz

Electrical Specifications for CLX Low Frequency Generators:

Model	Power Output	Harmonic Distortion	Input line Voltage/ Line Current
CLX600/H	600W	Less than -35dBc	115/208/220VAC; single phase; 50/60 Hz / 5A typical
CLX1000	1000W	Less than -40dBc	187-229VAC; three phase; 50/60 Hz/ 5A typical or one phase / 9A typical
CLX2500	2500W	Less than -40dBc	187-229VAC; three phase; 50/60 Hz / 13A typical
CLX5000	5000W	Less than -40dBc	187-229VAC; three phase; 50/60 Hz / 25A typical
CLX10000	10000W	Less than -40dBc	187-229VAC; three phase; 50/60 Hz / 50A typical

Model	Control I/O Connector	Standard Output Connector
CLX600/H	15-pin subminiature D type (female)	N or C
CLX1000	15-pin subminiature D type (female)	N or C
CLX2500	15-pin subminiature D type (female)	HN or N
CLX5000	25-pin subminiature D type (female)	HN, LC or 7/16
CLX10000	25-pin subminiature D type (male)	LC or 7/16

Mechanical Specifications/Certification: