Performance:
With millions of hours in the field, Comdel’s CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing power gain changes due to plasma impedance fluctuations. S-Technology helps eliminate headaches from transmission line length, mismatch conditions and process reliability issues.

Applications:
The CPS series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Features:

• Solid state for long life and low maintenance
  
• Class “C” linear design assures stability
  
• ETL Marked and SEMI F47 compliant
  
• Control circuitry ensures consistency during high VSWR conditions
  
• Output transistors are beta-matched to assure reliability
  
• Broadband, low “Q” circuits inhibit “squeeging” and self-resonant oscillations
  

Options:

• Wide range of AC input line voltages available
  
• Series, parallel or IBM interlock configurations
  
• External frequency control: input frequency can be varied +/- 10% of the center frequency from a TTL level, 50-ohm source
  
• Custom configured interface
  
  

Specifications:

• Frequency: Single frequency between 2 and 80 MHz
  
• Bandwidth on external frequency option: +/- 10%
  
• Forward power monitoring: 0-10 VDC for 0 to maximum-rated output
  
• Reflected power monitoring: 1-10 VDC for 0 to 20% of maximum-rated output
  
• Reflected power limits: Factory set at 20% of maximum output
  
• Spurious radiation: Exceeds FCC Part 18 requirements
  
• Power control linearity: Better than 3% of setting at power levels above 10% of rated power
  
• Standard available output connector: Type N or C
  

CPS 500:

• Output power: 500W
  
• Control I/O connector: 15-pin subminiature D type (female)
  
• Input line voltage: 115/200/208/220VAC; single phase; 50/60 Hz; 1KVA max.
  
• Cooling: Forced air
  
• Size: 5.25"H x 19"W x 16"D (13.3cm x 48.3cm x 40.6cm)
  
• Weight: 36 lbs. (16.3 kg)
  

CPS 1001:

• Output power: 1000W
  
• Control I/O connector: 15-pin subminiature D type (female)
  
• Input line voltage: 208VAC; three phase; 50/60 Hz; 6A max.
  
• Cooling: Water: 1.5 GPM (5.7 liters), 35° C max.
  
• Water connections: 1/4" NPT female, inlet & outlet
  
• Size: 5.25"H x 19"W x 16"D (13.3cm x 48.3cm x 40.6cm)
  
• Weight: 75 lbs. (34 kg)