Performance:
The CX series power supplies start at power ranges from 600 to 2500 Watts with fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.

Applications:
The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

CX High Power RF Supplies:
The CX series extends to high-power ranges of 5000 and 10,000 Watts.

CX Specialty Products:
The CXV600S Virtual-Quad series RF Generator is the ideal solution for applications requiring RF power to be delivered into one of four different locations.

Features:

• Standard fixed frequencies: 2 MHz,
  3.39 MHz, 13.56 MHz, 27.12 MHz
• Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
• ETL Marked for product safety and SEMI F47 compliant
  
• Local control via encoder and softkey inputs
  
• Standard RS-232 and analog/digital control
  
• Active front panel with full controls and programmable microprocessor
  
• Control circuitry ensures consistency during high VSWR conditions
  

Options:

• Wide range of AC input line voltages available
  
• Turbotune Technology for frequency tuning
  
• Master/Slave operation
  
• DeviceNet
  
  

General Specifications:

• Power control: 0-10 VDC input for 0 to maximum-rated output
  
• Power control linearity: £ 2% of setting at power levels above 10% of rated power
  
• Frequency: Any fixed frequency from 2 to 30 MHz (optional frequency agility +/- 10% of center frequency)
  
• Frequency stability: 13.56 MHz +/- 0.005%
  

Electrical Specifications:

Mechanical Specifications/Certification: